Date of Award


Document Type


Degree Name

Master of Science (MS)


Photonic Science and Technology

Committee Member

Dr. Lin Zhu, Committee Chair

Committee Member

Dr. Hai Xiao

Committee Member

Dr. Fei Peng


Array waveguide gratings (AWG) plays an important role in the field of in-formation and communication technologies through implementation of wavelength division multiplexing(WDM). An AWG consists of an input waveguide, two star cou-plers, and waveguide phase arrays which provides the wavelength dispersion effect along with the output star coupler. In this thesis, I developed and fabricated AWGs and expect to use the WDM inversely to make them compatible to proposed Wave-length Beam Combining(WBC) system by our group on the silicon nitride platform. In essence, the AWG theory is based on the theory of diffraction and interference. Design rules are summarized under the guidance of AWG theory. Mask layouts and routing algorithms are demonstrated. Simulation results are compared with fabri-cated devices. Applications and further improvements of AWG are discussed as well. Due to the limitation of fabrication, only features larger than 0.5um can be resolved in our stepper lithography. Best AWG performance of our fabricated devices can reach the insertion loss of 8 dB with 2 dB non-uniformity. The average channel spac-ing is around 2.8nm. 3 dB channel bandwidth is larger than 1nm with 12.65nm free spectrum range(FSR). Crosstalk is around 19 dB.



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