Date of Award

12-2012

Document Type

Thesis

Degree Name

Master of Science (MS)

Legacy Department

Materials Science and Engineering

Advisor

Sosolik, Chad E

Committee Member

Kennedy , Marian S

Committee Member

Peng , Fei

Abstract

We demonstrated using a double paddle oscillator to measure subsurface defect formation at room temperatures caused by ion implantation. This sensor has a low amount of noise based because of its high quality factors in certain modes. The double paddle oscillator was bombarded with Ar ions under ultra-high vacuum conditions while it was oscillating. The resultant resonant frequency changes were discussed as a method to determine defect formation inside the bulk substrate.

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