Date of Award
Master of Science (MS)
Materials Science and Engineering
Sosolik, Chad E
Kennedy , Marian S
Peng , Fei
We demonstrated using a double paddle oscillator to measure subsurface defect formation at room temperatures caused by ion implantation. This sensor has a low amount of noise based because of its high quality factors in certain modes. The double paddle oscillator was bombarded with Ar ions under ultra-high vacuum conditions while it was oscillating. The resultant resonant frequency changes were discussed as a method to determine defect formation inside the bulk substrate.
Puls, Jason, "Double Paddle Oscillators for the Mechanical Spectroscopy of Ion-Solid Interactions" (2012). All Theses. 1517.