Date of Award


Document Type


Degree Name

Master of Science (MS)

Legacy Department

Electrical Engineering

Committee Chair/Advisor

Kim, Sung-O

Committee Member

Yoon, Jeong-Rock

Committee Member

Harrell, Rod


This thesis documents the efforts taken to produce highly ionized and concentrated atmospheric pressure plasma using an arrayed atmospheric pressure plasma jet (APPJ) system. The honeycomb-shaped array features seven plasma jets operating in close enough proximity to one another to exhibit jet-to-jet coupling behavior. Optimal gas flow rates for the system were determined and intense plasma plumes composed of argon and/or helium are generated. Optical emission spectroscopy was employed to observe the charged particles responsible for the emissions of each gas discharge and APPJ operation mode. Plasma etching of indium tin oxide glass was conducted to verify the highly energetic properties of a plasma generated using two dissimilar gases, in order to confirm the possibility of plasma coupling between them.



To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.