Date of Award


Document Type


Degree Name

Master of Science (MS)

Legacy Department

Electrical Engineering


Kim, Sung-O

Committee Member

Yoon, Jeong-Rock

Committee Member

Harrell, Rod


This thesis documents the efforts taken to produce highly ionized and concentrated atmospheric pressure plasma using an arrayed atmospheric pressure plasma jet (APPJ) system. The honeycomb-shaped array features seven plasma jets operating in close enough proximity to one another to exhibit jet-to-jet coupling behavior. Optimal gas flow rates for the system were determined and intense plasma plumes composed of argon and/or helium are generated. Optical emission spectroscopy was employed to observe the charged particles responsible for the emissions of each gas discharge and APPJ operation mode. Plasma etching of indium tin oxide glass was conducted to verify the highly energetic properties of a plasma generated using two dissimilar gases, in order to confirm the possibility of plasma coupling between them.