Title
Device for radio frequency powered glow discharge spectrometry with external sample mount geometry
Document Type
Patent
Publication Date
2-4-1992
Patent Number
patent number 5086226
Abstract
A method and apparatus for analyzing solid sample materials mounted externally to the apparatus is provided wherein a low pressure glow discharge is initiated by applying a radio frequency potential to an integral, continuous solid sample and an electrically grounded anode in the presence of an inert gas, the glow discharge being maintained such that the inert gas is ionized and the ionized gas sputters sample material, the sputtered sample material then passing into an analyzer region for analysis.
Application Number
07/591544
Assignees
Clemson University (Clemson, SC)
Filing Date
1990-10-01
Primary/U.S. Class
250/288
Other/U.S. Class
250/281, 250/282, 250/423R, 356/311, 356/314
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