Document Type
Patent
Publication Date
4-9-1991
Patent Number
patent number 5006706
Abstract
A method and apparatus for analyzing solid sample materials is provided wherein a low pressure glow discharge is initiated by applying a radio frequency potential to an integral, continuous sample cathode and an electrically grounded anode in the presence of an inert gas, the glow discharge being maintained such that the inert gas is ionized and the ionized gas sputters sample material, the sputtered sample material then passing into an analyzer region for analysis.
Application Number
07/359157
Assignees
Clemson University (Clemson, SC)
Filing Date
1989-05-31
Primary/U.S. Class
250/288
Other/U.S. Class
250/281, 250/282, 250/423R
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