Document Type
Patent
Publication Date
6-4-2013
Patent Number
patent number 8453319
Abstract
The present invention relates to nanopillar arrays that may have relatively large dimensions and relatively large interpillar distances. The present invention also relates to methods of forming the same. In some embodiments of the invention, methods of forming hexagonal nanopillar arrays include forming a base comprising aluminum; forming a hexagonal pattern of pits in the aluminum; anodizing the aluminum to form aluminum oxide comprising a primary hexagonal nanopore array at the positions of the pits in the aluminum; depositing a conductive material into the nanopores of the primary hexagonal nanopore array; and removing the mask and the aluminum oxide to provide the hexagonal nanopillar array.
Application Number
12/825897
Assignees
Clemson University Research Foundation (Clemson, SC, US)
Filing Date
2010-06-29
Primary/U.S. Class
29/825
Other/U.S. Class
29/846