Document Type
Patent
Publication Date
10-19-2010
Patent Number
patent number 7818816
Abstract
Disclosed are methods and devices for patterning micro- and/or nano-sized pattern elements on a substrate using field emitted electrons from an element. Disclosed methods and devices can also be utilized to form nano- and micron-sized depressions in a substrate according to a more economical process than as has been utilized in the past. Methods include single-step methods by which structures can be simultaneously created and located at desired locations on a substrate. Methods include the application of a bias voltage between a probe tip and a substrate held at a relatively close gap distance. The applied voltage can promote current flow between the probe and the substrate via field emissions. During a voltage pulse, and within predetermined energy levels and tip-to-surface gap distances, three dimensional formations can be developed on the substrate surface.
Application Number
12/243402
Assignees
Clemson University Research Foundation (Anderson, SC, US)
Filing Date
2008-10-01
Primary/U.S. Class
850/1
Other/U.S. Class
73/105, 250/306, 250/310, 850/5, 850/33