Title

Device for radio frequency powered glow discharge spectrometry with external sample mount geometry

Document Type

Patent

Publication Date

2-4-1992

Patent Number

patent number 5086226

Abstract

A method and apparatus for analyzing solid sample materials mounted externally to the apparatus is provided wherein a low pressure glow discharge is initiated by applying a radio frequency potential to an integral, continuous solid sample and an electrically grounded anode in the presence of an inert gas, the glow discharge being maintained such that the inert gas is ionized and the ionized gas sputters sample material, the sputtered sample material then passing into an analyzer region for analysis.

Application Number

07/591544

Assignees

Clemson University (Clemson, SC)

Filing Date

1990-10-01

Primary/U.S. Class

250/288

Other/U.S. Class

250/281, 250/282, 250/423R, 356/311, 356/314