Date of Award
12-2012
Document Type
Thesis
Degree Name
Master of Science (MS)
Legacy Department
Materials Science and Engineering
Committee Chair/Advisor
Sosolik, Chad E
Committee Member
Kennedy , Marian S
Committee Member
Peng , Fei
Abstract
We demonstrated using a double paddle oscillator to measure subsurface defect formation at room temperatures caused by ion implantation. This sensor has a low amount of noise based because of its high quality factors in certain modes. The double paddle oscillator was bombarded with Ar ions under ultra-high vacuum conditions while it was oscillating. The resultant resonant frequency changes were discussed as a method to determine defect formation inside the bulk substrate.
Recommended Citation
Puls, Jason, "Double Paddle Oscillators for the Mechanical Spectroscopy of Ion-Solid Interactions" (2012). All Theses. 1517.
https://tigerprints.clemson.edu/all_theses/1517